• CVD ko PVD Processing
CVD ko PVD Processing

Akwai matakai guda uku a cikin tsarin shigar da tururi ta jiki (PVD): Fitar da barbashi daga albarkatun kasa; A barbashi ana hawa zuwa substrate; The barbashi condense, nucleate, girma da kuma fim a kan substrate.

Kemikal tururi (CVD), kamar yadda sunan ke nunawa, yana amfani da abubuwan da ke haifar da iskar gas don samar da ingantattun fina-finai ta hanyar halayen sinadarin atomic da kwayoyin halitta. Yana da kyau a faɗi cewa ana amfani da sinadarin tururi (CVD) a ko'ina a cikin babban ingancin semiconductor crystal epitaxy da shirye-shiryen fina-finai masu rufewa daban-daban. Misali, a MOS FET, fina-finan da CVD ya ajiye sun hada da polycrystalline Si, SiO2, sin, da sauransu.


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