Hariho ibyiciro bitatu murwego rwo guta imyuka yumubiri (PVD): Gusohora ibice biva mubikoresho fatizo; Ibice bitwarwa muri substrate; Ibice byegeranye, nucleate, gukura na firime kuri substrate.

Imyuka ya chimique (CVD), nkuko izina ribivuga, ikoresha reaction ya gaze ya prursor kugirango ikore firime zikomeye binyuze mumyuka ya atome na molekile. Twabibutsa ko kubika imyuka ya chimique (CVD) ikoreshwa cyane muri semiconductor yo mu rwego rwo hejuru kandi ikanategura firime zitandukanye. Kurugero, muri MOS FET, firime zabitswe na CVD zirimo polycrystalline Si, SiO2, icyaha, nibindi.